ZYGO ZMI-4104 4-axis VME stage measurement electronics metrology board Guaranteed quality

ZYGO ZMI-4104 4-axis VME stage measurement electronics metrology board

• Semiconductor manufacturing
• Aerospace and defense
• Biomedical research
• Nanotechnology

The ZMI-4104 is a modular board that can be plugged into a VME chassis. This allows for easy scalability, so you can add additional boards as needed to increase the number of axes that you can measure.

Here are some of the key features of the ZMI-4104:

• Up to 0.1 nanometer resolution
• Four-axis measurement capability
• Modular design for easy scalability
• Compatible with a variety of Zygo and third-party interferometers
• VME interface

（DCS）Distributed Control System

ABB : (07KT97/98,07AC),Industrial robot parts of DSQC series,DCS(AI810, DI810 PM645)

Foxboro : FBM214,FBM242,B0123HE

Triconex : 3625,3700A,3604E

Ovation : 5X00481G01,5X00419G02,5X00605G01

Woodword : 5462-758B,SST-PB3-PCU-2 SA1509-24

HIMA : F2-DO-16-02,F8650E F7131,Z7127 F3236

Yokogawa : SAI143-S03,S1 F9342L-02,AAR181-S00 S2

Honeywell : 51402497-200,51403519-160,51199194-100,CC-PDO801

Emerson : KJ4001X1-NB1,12P3368X012,1C31147G01

（PLC）Programmable Logic Controller

GE :IS210AEPSG2B,IS220UCSAH1A,IS215ACLEH1A,IS210AEAA

Allen-Bradley:1734-IB8 1734-OB8  1769-L18ER-BB1B  1756-IM16I

ICS Triplex : T8461,T8850,T8403,T8431,T8831,T8310

Schneider Modicon : 140DDI85300,140CPS11420,140CPU67060

Prosoft : MVI46-DFNT,MVI69-DFNT,MVI56-PDPMV1

Bachmann : MPC240/270(CPU),DI232,CM202,NT255AIO288

Woodhead : 9905-068 2301A,SSTESR2CLXRLL

（TSI）

Bently : 3500/22M,13860701,3500/25,3500/32M,3500/53,3500/40

EPRO :MMS6110,MMS6120,MMS6220,MMS6312,MMS6410MMS6

ENTEK : EK C6622HS,XM124 1440-SDM02-01RA

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