MKS RPS AX7695 AX7695 Integrated Remote Plasma Source Guaranteed Quality

The MKS RPS AX7695 is a remote plasma source, also known as an integrated remote plasma source, manufactured by MKS Instruments. It is a compact, self-contained unit that is used to generate a clean, low-cost source of atomic radicals for wafer processing in semiconductor manufacturing.

The AX7695 integrates a quartz vacuum chamber, RF power supply, and all necessary controls into a single unit. This makes it easy to install directly on the tool process chamber. The source uses an inductively coupled plasma (ICP) discharge to create the atomic radicals. The ICP discharge is created by passing RF power through a coil that is located outside of the vacuum chamber. The RF power creates an electromagnetic field that couples into the plasma, which causes the atoms in the plasma to become ionized. The ionized atoms then collide with each other and with the walls of the chamber, which creates the atomic radicals.

The AX7695 can be used with a variety of gases, including oxygen, argon, and nitrogen. The specific gas used will depend on the desired application. The source can also be operated at a variety of pressures and flow rates.

Here are some of the key features of the MKS RPS AX7695:

• Integrated remote plasma source
• On-wafer processing
• Higher flow rates
• Lowest cost “clean” source of atomic radicals
• Compact and self-contained design
• Easy to install
• Wide range of compatible gases
• Variety of operating pressures and flow rates

DHL, UPS, FedEx, and EMS express delivery typically take 3-10 working days, depending on the following factors:

Destination country/region

The size and weight of the package

Selected service type

Air mail transportation by China Post/Hong Kong Post usually takes 7-35 days, depending on the following factors:

Destination country/region

The size and weight of the package

The mode of transportation for air mail

In rare cases, strict customs clearance may result in slightly longer delivery times. Please be patient and wait.

The following are some factors that may prolong delivery time:

natural calamities

Political turmoil

Customs delay

Holidays

If you have not received the package within the expected delivery time, please contact your courier company.

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The delivery time is for reference only, and the actual delivery time may vary.

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I hope the above information is helpful to you.