The LAM 685-069171-100 is a high-precision spectrometer, and can measure film thicknesses to within a few angstroms. It is also very reliable, and can operate for many years without needing to be serviced.
The LAM 685-069171-100 is a critical piece of equipment for semiconductor manufacturers, and is used in a variety of applications, including:
- Etch process monitoring
- Film thickness measurement
- Defect detection
- Process control
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