AMAT 0760-01020 is a 3-port rotary union manufactured by Applied Materials (AMAT). It is specifically designed for use in the Mirra 200mm wafer processing system.
Based on the information I found, here is a description of AMAT 0760-01020:
·Manufacturer: Applied Materials (AMAT)
·Part number: 0760-01020
·Description: CPLG UNION ROTARY 3PORT
·Application: Mirra 200mm wafer processing system
·Number of ports: 3
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